Improved design of low-pressure fluidic microvalves
نویسندگان
چکیده
منابع مشابه
Improved design of low-pressure fluidic microvalves
Multilayer soft lithography (MSL) is used to fabricate monolithic elastomeric on-off microvalves by adopting a two-layer cross-channel architecture. The performance of microvalves is strongly dependent on the two-channel geometry (width, height and shape) and on the thickness of the interlayer membrane. Using a finite element model previously validated against experiments, we propose a new flui...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/17/8/010